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Profile of Microlens Fabricated by the Thermal Reflow Process

✍ Scribed by Jhy-Cherng Tsai; Yong-Sung Hsu

Book ID
114654507
Publisher
IEEE
Year
2011
Tongue
English
Weight
880 KB
Volume
47
Category
Article
ISSN
0018-9464

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## Abstract A systematic approach to achieving high quality gapless microlens array fabrication using the incomplete developing and thermal reflow process was developed in this study. The experimental results proved that a hexagonal microlens array with a maximum 100% fill‐factor could be successfu