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Fabrication and analysis of the reflowed microlens arrays using JSR THB-130

✍ Scribed by C. K. Chung; Y. Z. Hong


Book ID
106185097
Publisher
Springer-Verlag
Year
2006
Tongue
English
Weight
516 KB
Volume
13
Category
Article
ISSN
0946-7076

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## Abstract A systematic approach to achieving high quality gapless microlens array fabrication using the incomplete developing and thermal reflow process was developed in this study. The experimental results proved that a hexagonal microlens array with a maximum 100% fill‐factor could be successfu