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Production high-energy ion implanters with milliampere beam capabilities

✍ Scribed by P. Boisseau; A. Dart; A.S. Denholm; H.F. Glavish; B. Libby; G. Simcox

Book ID: 113279722
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 410 KB
Volume: 37-38
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90254-1

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