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Production and deposition of CN radicals to produce amorphous carbon nitride films with high [N]/([N]+[C]) ratio

✍ Scribed by Ito, Haruhiko

Book ID: 122674780
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 274 KB
Volume: 17
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2007.08.014

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