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Processing of titanium films on silicon using a Q-switched ruby laser

✍ Scribed by E. Maydell-Ondrusz; P.L.F. Hemment; K.G. Stephens

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 432 KB
Volume: 144
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90421-9

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