✦ LIBER ✦

PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS

✍ Scribed by Polla, Dennis L.; Francis, Lorraine F.

Book ID: 120738699
Publisher: Annual Reviews
Year: 1998
Tongue: English
Weight: 747 KB
Volume: 28
Category: Article
ISSN: 0084-6600
DOI: 10.1146/annurev.matsci.28.1.563

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