Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes

✍ Scribed by Timo Mappes; Sven Achenbach; Juergen Mohr

• Book ID: 106185086
• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 391 KB
• Volume: 13
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-006-0182-3