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Process and electrical (modulator) efficiency of plasma immersion ion implantation

✍ Scribed by Xiubo Tian; Xuchu Zeng; Chu, P.K.

Book ID: 114559172
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 142 KB
Volume: 29
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.928952

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