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Process alternatives and scaling limits for high-density silicon tactile imagers

✍ Scribed by K. Suzuki; K. Najafi; K.D. Wise

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 496 KB
Volume: 23
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)87059-r

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