✦ LIBER ✦
Multipolar magnetic field structures for the scaling-up of high density plasmas excited in the d.c. to microwave frequency range and applicable to sputtering and chemical processing
✍ Scribed by J. Pelletier; T. Lagarde; Y. Arnal; R. Burke; J. Cocagne
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 602 KB
- Volume
- 76-77
- Category
- Article
- ISSN
- 0257-8972
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