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Pressure stability in reactive magnetron sputtering

✍ Scribed by A.G. Spencer; R.P. Howson; R.W. Lewin

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 456 KB
Volume: 158
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90310-0

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