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Pressure stability in reactive magnetron sputtering: A G Spencer et al,Thin Solid Films,158, 1988, 141–149

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 152 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90758-6

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