✦ LIBER ✦
7482. Dynamic control of reactive magnetron sputtering: a theoretical analysis: A G Spencer et al,Thin Solid Films, 186, 1990, 129–136
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 151 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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