𝔖 Bobbio Scriptorium
✦   LIBER   ✦

: Pressure and power dependence

✍ Scribed by Smith, D. H. S.; Wyatt, A. F. G.

Book ID
121459407
Publisher
The American Physical Society
Year
2007
Tongue
English
Weight
410 KB
Volume
76
Category
Article
ISSN
1098-0121

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## Abstract The sporicidal effect of 20 different radio‐frequency plasma processes produced by combining five different gas mixtures [O~2~, Ar/H~2~ (50/50%), Ar/H~2~ (5/95%), O~2~/H~2~ (50/50%), O~2~/H~2~ (95/5%)] with four power/pressure settings were tested. Sporicidal effects of oxygen‐containin