Preparation of α-alumina/polymethacrylic acid composite abrasive and its CMP performance on glass substrate

✍ Scribed by Zefang Zhang; Hong Lei

• Book ID: 104051890
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 736 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.01.001