Preparation of silica/ceria nano composite abrasive and its CMP behavior on hard disk substrate

✍ Scribed by Hong Lei; Fengling Chu; Baoqi Xiao; Xifu Tu; Hua Xu; Haineng Qiu

• Book ID: 104052465
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 451 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.10.006