Preparation of YBa2Cu3O7โx thin films by
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H.J. Chang; Y. Doshida; Y. Watanabe; K. Shimizu; Y. Okamoto; R. Akihama; J.T. So
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Article
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1992
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Elsevier Science
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English
โ 547 KB
Superconducting YBa2Cu307\_ x (YBCO) thin films on MgO (100) substrates were successfully fabricated by a reactive evaporation method under oxygen plasma conditions. In this paper, details of the reactive evaporation method and the optimum preparation conditions are described. The superconducting tr