Preparation of transparent BN films with
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Guo-Xing Li; Yi Liu; Bo Wang; Xue-Mei Song; Er Li; Hui Yan
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Article
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2008
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Elsevier Science
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English
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A novel approach was investigated to obtain the superhydrophobicity on surfaces of boron nitride films. In this method boron nitride films were deposited firstly on Si(1 0 0) and quartz substrate using a radio frequency (RF) magnetron sputtering system, and then using CF 4 plasma treatment, the topm