Preparation of titanium nitride onto molybdenum, stainless steel and carbon by gas absorption and reactive r.f. sputtering

✍ Scribed by Kazuhiko Sato; Mamoru Mohri; Toshiro Yamashina; Katsumasa Yabe

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 447 KB
• Volume: 103
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(82)90610-9