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Preparation of quaternary nitrogen-containing plasma films and their application to moisture sensors

✍ Scribed by Norihiro Inagaki

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
381 KB
Volume
118
Category
Article
ISSN
0040-6090

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Production of nitrogen-containing carbon
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## Abstract A magnetically driven carbon‐shunting arc discharge was generated in nitrogen gas circumstance and amorphous carbon nitride (a‐CN__~x~__) films were prepared. A silicon substrate was immersed into the plasma, and a series of pulse voltage was applied to the substrate synchronizing with