Preparation of nitrogen-rich CNx films with inductively coupled plasma CVD and pulsed laser deposition

✍ Scribed by BULI, J

• Book ID: 122089283
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 850 KB
• Volume: 10
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/S0925-9635(01)00436-8