Preparation of Mo/Si Schottky barriers by chemical vapour deposition of molybdenum onto epitaxial silicon substrates

✍ Scribed by S.S. Simeonov; E.I. Kafedjiiska; A.L. Guerassimov

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 560 KB
• Volume: 115
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(84)90092-0