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Preparation of functionally gradient fluorocarbon polymer films by plasma polymerization of NF3 and propylene

✍ Scribed by Akimasa Tasaka; Akiko Komura; Yoshiharu Uchimoto; Minoru Inaba; Zempachi Ogumi

Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
713 KB
Volume
34
Category
Article
ISSN
0887-624X

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✦ Synopsis

Fluorocarbon polymer films were prepared by plasma polymerization using nitrogen trifluoride (NF,) and propylene as starting materials. To improve their adhesiveness to substrates, a novel functionally gradient film in which the content of fluorine decreased continuously from the surface to the interior was prepared by changing source gas composition during deposition. This film had a smooth and pinhole-free surface, and had a high contact angle (110') for water drop. In addition, it showed good adhesion to a glass substrate.

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