Preparation of electrical insulating films for high temperature devices by ion beam assisted plasma CVD

✍ Scribed by Hiroshi Nakai; Osamu Harasaki; Joji Shinohara

• Book ID: 114194340
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 361 KB
• Volume: 54
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(98)00022-4