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Preparation of diamond films by axial magnetron sputtering of vitreous carbon target

โœ Scribed by K.K. Chattopadhyay; J. Dutta; S. Chaudhuri; A.K. Pal

Book ID
119124966
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
509 KB
Volume
16
Category
Article
ISSN
0167-577X

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Optical properties of mixed phase a-C/di
Optical properties of mixed phase a-C/diamond films deposited by dc magnetron sputtering of vitreous carbon target
โœ S.N. Kundu; M Basu; K.K. Chattopadhyay; A.B. Maity; S Chaudhuri; A.K. Pal ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 944 KB

## Mixed phase a-C/diamond films were deposited on glass and fused silica substrates by dc magnetron sputtering of a vitreous carbon target in argon plasma. The optical characterization of the films, deposited at zero bias voltage, (V, = 0) indicated a high band gap (EB > 3 eV). E, increased furth