Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

✍ Scribed by Kikuo Tominaga; Masahiro Kataoka; Tetsuya Ueda; Munfei Chong; Yoshihiro Shintani; Ichiro Mori

• Book ID: 107864486
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 412 KB
• Volume: 253
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90285-2