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Preparation of carbonitride films in the active and afterglow phases of a glow discharge

✍ Scribed by Grigorian, G. M.; Kochetov, I. V.

Book ID
120440734
Publisher
SP MAIK Nauka/Interperiodica
Year
2013
Tongue
English
Weight
243 KB
Volume
39
Category
Article
ISSN
1063-780X

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## Abstract The pulsed power operation mode of a radiofrequency (rf) glow discharge time‐of‐flight mass spectrometer was investigated, for several ions, in terms of intensity profiles along each pulse period. Particular attention was paid to the plateau and transient afterglow regions. An rf pulse