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Preparation of AlN and LiNbO3 thin films on diamond substrates by sputtering method

✍ Scribed by Ishihara, M.; Nakamura, T.; Kokai, F.; Koga, Y.

Book ID: 121822448
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 237 KB
Volume: 11
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00657-4

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