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Preparation of Al-doped ZnO transparent electrodes suitable for thin-film solar cell applications by various types of magnetron sputtering depositions

✍ Scribed by Jun-ichi Nomoto; Tomoyasu Hirano; Toshihiro Miyata; Tadatsugu Minami


Book ID
113937310
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
1005 KB
Volume
520
Category
Article
ISSN
0040-6090

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## Abstract This paper describes the optimization of ZnO:Al (AZO) thin films formed by a magnetron sputtering method for the purpose of creating a substitute for the indium‐tin‐oxide (ITO) transparent electrodes used in liquid crystal display (LCD) applications. New AZO thin‐film preparation techni