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Preparation and properties of Ta2O5film capacitors using TiSi2bottom electrode

✍ Scribed by H. -S. Yang; Y. S. Choi; S. M. Cho

Book ID: 107457937
Publisher: Springer US
Year: 1999
Tongue: English
Weight: 211 KB
Volume: 28
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-999-0132-9

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