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Preparation and Microstructure of Tantalum Nitride Thin Film by Cathodic Arc Deposition

✍ Scribed by Li, Li; Er-Wu, Niu; Guo-Hua, Lv; Wen-Ran, Feng; Wei-Chao, Gu; Guang-Liang, Chen; Gu-Ling, Zhang; Song-Hua, Fan; Chi-Zi, Liu; Si-Ze, Yang

No coin nor oath required. For personal study only.

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