Optical properties of SIC/SIO2 composite
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Jian Yi; XiaoDong He; Yue Sun; Yao Li
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Article
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2007
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John Wiley and Sons
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English
β 217 KB
## Abstract SiC film was deposited by electron beamβphysical vapor deposition on thermal oxidized silicon substrates at 750Β°C, and SiC/SiO~2~ composite thin film was prepared. The obtained composite film was analyzed by Fourierβtransform infrared (FTIR) transmission and reflection spectroscopy, and