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Preparation and electrophysical properties of Al2O3 layers on silicon substrates

✍ Scribed by E. Atanasova; P. Kamadjiev; K. Kirov; S. Simeonov


Book ID
107862313
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
149 KB
Volume
32
Category
Article
ISSN
0040-6090

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