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Preparation and characterization of vacuum deposited semiconducting nanocrystalline polymeric thin film sensors for detection of HCl

✍ Scribed by S.C.K. Misra; Prafull Mathur; Maneesha Yadav; M.K. Tiwari; S.C. Garg; P. Tripathi


Book ID
108247897
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
221 KB
Volume
45
Category
Article
ISSN
0032-3861

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Polycrystalline zinc oxide thin films with thicknesses in the range 0.3 ~m-1 #m were deposited on silicon and alumina substrates by a spray chemical vapour deposition method. The film was characterized for crystallinity, resistivity and carrier concentration. A modified heterostructure Pd/ZnO(0.38 ~