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Preparation and characterization of Cu:SiO2 aerogel films

✍ Scribed by Young-Jei Oh; Bo-Ae Nam


Book ID
113914241
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
992 KB
Volume
13
Category
Article
ISSN
1293-2558

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SiO aerogel film has a promising property as intermetal dielectrics (IMD) for its low dielectric constant. 2 However, a stable and porous SiO aerogel film was not properly synthesized due to the rapid evaporation of 2 solvent during spin coating even in a solvent saturated atmosphere. So less evapor