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Preparation and Characterization of Al-Mg-B Thin Films by Magnetron Sputtering

✍ Scribed by Liu, Wen; Meng, Qing Sen; Miao, Yang; Chen, Feng Hua; Hu, Li Fang


Book ID
120656226
Publisher
Trans Tech Publications, Ltd.
Year
2012
Tongue
English
Weight
467 KB
Volume
465
Category
Article
ISSN
1662-8958

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Preparation of MgB2 superconducting thin
✍ R. Mičunek; A. Plecenik; P. KΓΊΕ‘; M. Zahoran; M. TomΓ‘Ε‘ek; T. Plecenik; M. Gregor; πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 383 KB

Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor