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Preferred orientation of TiN films studied by a real time synchrotron x-ray scattering

✍ Scribed by Je, J. H.; Noh, D. Y.; Kim, H. K.; Liang, K. S.


Book ID
120217558
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
521 KB
Volume
81
Category
Article
ISSN
0021-8979

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