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Development of texture in TiN films by use of in situ synchrotron x-ray scattering

✍ Scribed by Schell, N.; Matz, W.; Bøttiger, J.; Chevallier, J.; Kringhøj, P.


Book ID
120246665
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
477 KB
Volume
91
Category
Article
ISSN
0021-8979

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