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Preferential sputtering effects in the deposition of TiAl films by filtered cathodic arc deposition

✍ Scribed by P.J. Martin; A. Bendavid; L.S. Wielunski; I. Katardjiev; S. Berg


Book ID
114169157
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
336 KB
Volume
129
Category
Article
ISSN
0168-583X

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