Preferential amorphization and defect annihilation at nanocavities in silicon during ion irradiation

✍ Scribed by Williams, J. S.; Zhu, Xianfang; Ridgway, M. C.; Conway, M. J.; Williams, B. C.; Fortuna, F.; Ruault, M.-O.; Bernas, H.

• Book ID: 118272499
• Publisher: American Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 637 KB
• Volume: 77
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1334355