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Precursors of a-CNx(:H) films from the decompositions of BrCN and CH3CN with the discharged products of Ar

โœ Scribed by Ito, Haruhiko; Yamamoto, Ayumi; Araki, Hitoshi; Wada, Akira


Book ID
121903634
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
764 KB
Volume
24
Category
Article
ISSN
0925-9635

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