Sticking probability of CN(X2Σ+) radicals onto amorphous carbon nitride films formed from the decomposition of BrCN induced by the microwave discharge flow of Ar

✍ Scribed by Haruhiko Ito; Hitoshi Araki; Akira Wada; Ayumi Yamamoto; Tsuneo Suzuki; Hidetoshi Saitoh

• Book ID: 113880711
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 957 KB
• Volume: 86
• Category: Article
• ISSN: 1386-1425
• DOI: 10.1016/j.saa.2011.10.033