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Precursors for CVD growth of nanocrystalline diamond

✍ Scribed by T. Soga; T. Sharda; T. Jimbo


Book ID
110138447
Publisher
SP MAIK Nauka/Interperiodica
Year
2004
Tongue
English
Weight
187 KB
Volume
46
Category
Article
ISSN
1063-7834

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## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea