Precipitate strain relief via point defect interaction: models for SiO2 in silicon

✍ Scribed by W.J. Taylor; U.M. Gösele; T.Y. Tan

• Book ID: 113300380
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 41 KB
• Volume: 36
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/0254-0584(94)90060-4