Precipitate strain relief via point defect interaction: models for SiO2 in silicon

✍ Scribed by W.J. Taylor; U.M. Gösele; T.Y. Tan

• Book ID: 113300308
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 970 KB
• Volume: 34
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/0254-0584(93)90208-4