Post-growth annealing and wide bandgap modulation of BeZnO layers grown by RF co-sputtering of ZnO and Be targets

Growth of ZnO nanocrystals in silica by

Growth of ZnO nanocrystals in silica by rf co-sputter deposition and post-annealing

✍ V.V. Siva Kumar; F. Singh; Amit Kumar; D.K. Avasthi 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Thin films with ZnO nanocrystals in silica were synthesized by rf reactive magnetron co-sputter deposition and post-annealing. The films were deposited from a ZnO/Si composite target in an rf oxygen plasma. The deposited films were annealed in air/vacuum at high temperatures to grow ZnO nanocrystals