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Post-annealing influence on properties of N–In codoped ZnO thin films prepared by ion beam enhanced deposition method

✍ Scribed by Ningyi Yuan; Lining Fan; Jinhua Li; Xiuqin Wang


Book ID
108060121
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
380 KB
Volume
253
Category
Article
ISSN
0169-4332

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In 2 O 3 :Sn (ITO) films were deposited on quartz substrates by direct current magnetron sputtering and annealed in N 2 at temperatures ranging from 150 to 350 • C for 1 h. The structure and morphology of the films were investigated by X-ray diffraction and atomic force microscopy. The results demon