Post-annealing effects on the shallow-junction characteristics caused by high-fluence 77 keV BSi molecular ion implantations at room and liquid nitrogen temperatures

✍ Scribed by J.H. Liang; S.C. Wang

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 458 KB
• Volume: 266
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2008.10.002