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Porous Silicon Physics and Device Applications: A Status Report

✍ Scribed by Fauchet, P. M. ;von Behren, J. ;Hirschman, K. D. ;Tsybeskov, L. ;Duttagupta, S. P.

Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
390 KB
Volume
165
Category
Article
ISSN
0031-8965

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The aim of this experiment is to grow a thin silicon layer (<50Β΅m) by Liquid Phase Epitaxy (LPE) onto porous silicon. This one acts as a sacrificial layer in order to transfer the 50 Β΅m epitaxial layer onto foreign substrates like ceramics. After transfer, the silicon wafer is then re-usable. In thi