𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Porous silicon capping by CVD diamond

✍ Scribed by A.J. Fernandes; P.J. Ventura; R.F. Silva; M.C. Carmo

Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
223 KB
Volume
52
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Silicon incorporation in CVD diamond lay
Silicon incorporation in CVD diamond layers
✍ Barjon, J. ;Rzepka, E. ;Jomard, F. ;Laroche, J.-M. ;Ballutaud, D. ;Kociniewski, πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 161 KB

## Abstract The silicon incorporation in diamond is an important issue as silicon is widely used as a substrate for the growth of polycrystalline thin films. Incorporated silicon impurities are suspected to come from the hydrogen etching of the silicon substrate. To clearly establish this point we

Novel microfluidic flow sensor based on
Novel microfluidic flow sensor based on a microchannel capped by porous silicon
✍ Pagonis, D. N. ;Petropoulos, A. ;Kaltsas, G. ;Nassiopoulou, A. G. ;Tserepi, A. πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 284 KB

## Abstract This work concerns the fabrication, modeling and characterization of a novel microfluidic flow sensor based on a microchannel capped with a porous silicon membrane, on top of which the sensor active elements are integrated. The microchannel is formed through a two‐step anodization proce